Sökning: "ion beam etching"

Visar resultat 1 - 5 av 34 avhandlingar innehållade orden ion beam etching.

  1. 1. Ion beam etching of InP based materials

    Författare :Carl-Fredrik Carlström; KTH; []
    Nyckelord :InP; dry etching; ion beam etching; RIBE; CAIBE; hydrocarbon chemistry; trimethylamine; As P exchange reaction; morphology; low damage; AFM; SCM; annealing;

    Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER

  3. 2. Case Studies in Ion Beam Assisted Nanostructure Engineering

    Författare :Rajdeep Kaur; Petter Ström; Daniel Primetzhofer; Tuan Tran; Naureen Ghafoor; Uppsala universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Ion irradiation; material modification; nanostructures; calcium fluoride; polyimide; etching; Fysik; Physics;

    Sammanfattning : Beams of energetic ions can be used for material analysis and modification. It provides us with a tool featuring unique control over the area, depth and amount of damage in the material. This property of ion beams can be used to generate desired changes in material properties or form nanostructures with specific characteristics in the material. LÄS MER

  4. 3. Two-Dimensional Photonic Crystals in InP-based Materials

    Författare :Mikaël Mulot; KTH; []
    Nyckelord :Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

    Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER

  5. 4. Ion Tracks for Micro- and Nanofabrication : From Single Channels to Superhydrophobic Surfaces

    Författare :Reimar Spohr; Lars Westerberg; Lars Montelius; Uppsala universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Ion track; single ion; real time; phase detection; conductometric cell; conductometry; electro replication; microtechnology; nanotechnology; surfactant; self organization; GMR; magnetic; sensor technology; hydrophobic; tilted texture.; Physics; Fysik; Materialvetenskap; Materials Science;

    Sammanfattning : A method is described for preset-count irradiations between 1 and 100 ions singling-out individual ions from an ion beam with more than a billion ions arriving per second. The ion tracks are etched in a conductometric system with real-time evaluation of the acquired data. The etch process can be interrupted when reaching a preset channel diameter. LÄS MER

  7. 5. Chemically assisted ion beam etching and properites of single electron traps in MOS structures

    Författare :Zhaohua Xiao; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : .... LÄS MER