Sökning: "dry etching"
Visar resultat 1 - 5 av 26 avhandlingar innehållade orden dry etching.
1. Ion beam etching of InP based materials
Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER
2. Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures
Sammanfattning : .... LÄS MER
3. Two-Dimensional Photonic Crystals in InP-based Materials
Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER
4. Top-down Fabrication Technologies for High Quality III-V Nanostructures
Sammanfattning : III-V nanostructures have attracted substantial research effort due to their interesting physical properties and their applications in new generation of ultrafast and high efficiency nanoscale electronic and photonic components. The advances in nanofabrication methods including growth/synthesis have opened up new possibilities of realizing one dimensional (1D) nanostructures as building blocks of future nanoscale devices. LÄS MER
5. Design, Simulation and Characterization of Some Planar Lightwave Circuits
Sammanfattning : Optical devices based on planar lightwave circuit (PLC) technology have the advantages of small size, high reliability, possibility for large scale production, and potential integration with electronics. These devices are widely employed in optical telecommunications, sensing, data storage, imaging, and signal processing. LÄS MER