Sökning: "Carl-Fredrik Carlström"
Hittade 1 avhandling innehållade orden Carl-Fredrik Carlström.
1. Ion beam etching of InP based materials
Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER
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