Sökning: "etching"
Visar resultat 1 - 5 av 247 avhandlingar innehållade ordet etching.
1. Micromachining by sacrificial aluminium etching
Sammanfattning : .... LÄS MER
2. Ion beam etching of InP based materials
Sammanfattning : Dry etching is an important technique for pattern transferin fabrication of most opto-electronic devices, since it canprovide good control of both structure size and shape even on asub-micron scale. Unfortunately, this process step may causedamage to the material which is detrimental to deviceperformance. LÄS MER
3. Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures
Sammanfattning : .... LÄS MER
4. Two-Dimensional Photonic Crystals in InP-based Materials
Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER
5. Fabrication of Low-Dimensional Structures in III-V Semiconductors
Sammanfattning : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. LÄS MER