Sökning: "electromechanical sensing"

Visar resultat 1 - 5 av 10 avhandlingar innehållade orden electromechanical sensing.

1. 1. Integration of graphene into MEMS and NEMS for sensing applications

   Författare :Xuge Fan; Frank Niklaus; Peter Steeneken; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; Nano-electromechanical systems NEMS ; heterogeneous 3D integration; Graphene; single-layer graphene; double-layer graphene; bilayer graphene; chemical vapor deposition CVD ; suspended graphene beams; suspended graphene membranes; doubly clamped; fully clamped; silicon on insulator SOI ; vapor hydrofluoric acid VHF ; Young’s modulus; built-in stress; built-in tension; piezoresistivity; gauge factor; accelerometer; resonators; electromechanical sensing; advanced transducers; humidity; gas sensing; sensitivity; CO2 sensing; graphene grain boundary; line defects; optical microscopy; wire bonding; Electrical Engineering; Elektro- och systemteknik;

   Sammanfattning : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. LÄS MER

3. 2. Towards Unconventional Applications of Wire Bonding

   Författare :Stephan Schröder; Frank Niklaus; Michael Mayer; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; heterogeneous 3D integration; wire bonding; wire integration; transfer wafer bonding; nondispersive infrared gas sensing; low-stress packaging; shape memory alloy SMA ; infrared IR emitter; through silicon via TSV ; ethanol sensing; nitric oxide gas sensing; wafer-level; chip-level; Kanthal; nickel chromium NiCr ; Electrical Engineering; Elektro- och systemteknik;

   Sammanfattning : This thesis presents novel heterogeneous integration approaches of wire materials to fabricated and package MEMS devices by exploring unconventional applications of wire bonding technology. Wire bonding, traditionally endemic in the realm of device packaging to establish electrical die-to-package interconnections, is an attractive back-end technology, offering promising features, such as high throughput, flexibility and placement accuracy. LÄS MER

4. 3. SiC Readout IC for High Temperature Seismic Sensor System

   Författare :Ye Tian; Carl-Mikael Zetterling; Ana Rusu; Philip A. Mawby; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Silicon carbide SiC ; bipolar junction transistor BJT ; integrated circuit IC ; sigma-delta Σ∆ ; data conversion; operational amplifier OpAmp ; VBIC; SPICE Gummel-poon; high-temperature; electromechanical; accelerometer; capacitive sensor; Informations- och kommunikationsteknik; Information and Communication Technology;

   Sammanfattning : Over the last decade, electronics operating at high temperatures have been increasingly demanded to support in situ sensing applications such as automotive, deep-well drilling and aerospace. However, few of these applications have requirements above 460 °C, as the surface temperature of Venus, which is a specific target for the seismic sensing application in this thesis. LÄS MER

5. 4. Bright Lights: Innovative Micro- and Nano-Patterning for Sensing and Tissue Engineering

   Författare :Alessandro Enrico; Göran Stemme; Frank Niklaus; Anna Herland; Jürgen Brugger; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; nanotechnology; nanowires; microfabrication; tissue engineering; crack-lithography; direct writing; femtosecond lasers; two-photon polymerization; 3D micromachining; cavitation molding; scalable optical patterning; 2D materials; surface structuring; bacterial-surface interaction.; Electrical Engineering; Elektro- och systemteknik;

   Sammanfattning : Light is the primary source of energy on our planet and has been a significant driver in the evolution of human society and technology. Light finds applications in two-dimensional (2D) photolithography and three-dimensional (3D) printing, where a pattern is transferred to a material of interest by ultraviolet (UV) light exposure, and in laser scribing and cutting, where high power lasers are used to pattern the surface of objects or cut through the bulk of the material of interest. LÄS MER

7. 5. Integrated Photonics for Quantum Optics

   Författare :Samuel Gyger; Val Zwiller; Stephan Steinhauer; Ali W. Elshaari; Marijn A. M. Versteegh; Matthew D. Shaw; KTH; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; integrated photonics; single-photons; single-photon sources; quantum dots; single-photon detectors; SNSPD; integrerad fotonik; enstaka fotoner; enstaka fotonkällor; kvantprickar; enstaka fotondetektorer; SNSPDs; Optics and Photonics; Optik och fotonik; Physics; Fysik;

   Sammanfattning : Quantum physics allows us a vision of Nature's forces that bind the world, all its seeds and sources. After decades of primarily scientific research, we've arrived at a stage in time where quantum technology can be applied to practical problems and add value outside the field. LÄS MER