Sökning: "suspended graphene beams"

Hittade 3 avhandlingar innehållade orden suspended graphene beams.

  1. 1. Integration of graphene into MEMS and NEMS for sensing applications

    Författare :Xuge Fan; Frank Niklaus; Peter Steeneken; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; Nano-electromechanical systems NEMS ; heterogeneous 3D integration; Graphene; single-layer graphene; double-layer graphene; bilayer graphene; chemical vapor deposition CVD ; suspended graphene beams; suspended graphene membranes; doubly clamped; fully clamped; silicon on insulator SOI ; vapor hydrofluoric acid VHF ; Young’s modulus; built-in stress; built-in tension; piezoresistivity; gauge factor; accelerometer; resonators; electromechanical sensing; advanced transducers; humidity; gas sensing; sensitivity; CO2 sensing; graphene grain boundary; line defects; optical microscopy; wire bonding; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. LÄS MER

  2. 2. Nanoelectromechanical systems from carbon nanotubes and graphene

    Författare :Niklas Lindahl; Göteborgs universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; carbon nanotubes; graphene; nanoelectromechanical systems; fabrication; fabrication;

    Sammanfattning : Carbon nanotubes and graphene have many interesting properties. To exploit the properties in applications their synthesis and incorporation in devices has to be understood and controlled. This thesis is based on experimental studies on synthesis of carbon nanotubes and fabrication of nanoelectromechanical systems from carbon nanotubes and graphene. LÄS MER

  3. 3. There's Plenty of Room in Higher Dimensions - Nonlinear Dynamics of Nanoelectromechanical Systems

    Författare :Martin Eriksson; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; nonresonant actuation; quantum dots; NEMS; internal resonance; superconductivity; nonlinear dynamics;

    Sammanfattning : Nanoelectromechanical systems (NEMS) couple the dynamics of electrons to vibrating nanostructures such as suspended beams or membranes. These resonators can be used in for instance nanoelectronics and sensor applications. NEMS are also of fundamental interest since electrons exhibit strong quantum effects when confined in nanoobjects. LÄS MER