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Visar resultat 1 - 5 av 34 avhandlingar som matchar ovanstående sökkriterier.

  1. 1. AlN Thin Film Electroacoustic Devices

    Författare :Gonzalo Fuentes Iriarte; I.V. Katardjiev; G.F. Iriarte; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik; elektronik; Electronics;

    Sammanfattning : Recently, the enormous growth in personal communications systems (PCS), satellite communication and various other forms of wireless data communication has made analogue frequency control a key issue as the operation frequency increases to the low/medium GHz range. Surface acoustic wave (SAW) and bulk acoustic wave (BAW) electroacoustic devices are widely used today in a variety of applications both in consumer electronics as well as in specialized scientific and military equipment where frequency control is required. LÄS MER

  3. 2. Heterogeneous 3D Integration and Packaging Technologies for Nano-Electromechanical Systems

    Författare :Simon J. Bleiker; Frank Niklaus; Gary K. Fedder; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Nano-electromechanical systems NEMS ; Micro-electromechanical systems MEMS ; heterogeneous 3D integration; CMOS integration; Morethan- Moore MtM ; adhesive wafer bonding; NEM switch; FPGA; contact reliability; hermetic vacuum packaging; Cu low-temperature welding; through silicon vias TSVs ; magnetic self-assembly;

    Sammanfattning : Three-dimensional (3D) integration of micro- and nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. LÄS MER

  4. 3. Integration of graphene into MEMS and NEMS for sensing applications

    Författare :Xuge Fan; Frank Niklaus; Peter Steeneken; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Micro-electromechanical systems MEMS ; Nano-electromechanical systems NEMS ; heterogeneous 3D integration; Graphene; single-layer graphene; double-layer graphene; bilayer graphene; chemical vapor deposition CVD ; suspended graphene beams; suspended graphene membranes; doubly clamped; fully clamped; silicon on insulator SOI ; vapor hydrofluoric acid VHF ; Young’s modulus; built-in stress; built-in tension; piezoresistivity; gauge factor; accelerometer; resonators; electromechanical sensing; advanced transducers; humidity; gas sensing; sensitivity; CO2 sensing; graphene grain boundary; line defects; optical microscopy; wire bonding; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. LÄS MER

  5. 4. Thin Film Electroacoustic Devices for Biosensor Applications

    Författare :Gunilla Wingqvist; Ilia Katardjiev; Anita Lloyd Spetz; Kirsi Tappura; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; Elektronik; Elektronik; Electronics;

    Sammanfattning : Biosensors are today important devices within various application areas. In this thesis a new type of label-free biosensor device is studied, which is fabricated using the same processes used for the fabrication of integrated circuits. This enables tighter integration and further sensors/biosensor miniaturization. LÄS MER

  7. 5. Electromechanical Instability in Suspended Nanowire-Based NEMS

    Författare :Fabio Santandrea; Göteborgs universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NEMS; Shuttle instability; Coulomb blockade; Carbon Nanotubes; Electronic Transport; Nonlinear Dynamics;

    Sammanfattning : "Nanoelectromechanical systems'' (NEMS) are a class of nanometer-sized mechanical structures coupled to electronic device of comparable dimensions. Their peculiar features make them interesting both from the technological and fundamental research viewpoints. LÄS MER