Sökning: "Electromechanical devices"
Visar resultat 1 - 5 av 34 avhandlingar innehållade orden Electromechanical devices.
1. AlN Thin Film Electroacoustic Devices
Sammanfattning : Recently, the enormous growth in personal communications systems (PCS), satellite communication and various other forms of wireless data communication has made analogue frequency control a key issue as the operation frequency increases to the low/medium GHz range. Surface acoustic wave (SAW) and bulk acoustic wave (BAW) electroacoustic devices are widely used today in a variety of applications both in consumer electronics as well as in specialized scientific and military equipment where frequency control is required. LÄS MER
2. Heterogeneous 3D Integration and Packaging Technologies for Nano-Electromechanical Systems
Sammanfattning : Three-dimensional (3D) integration of micro- and nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. LÄS MER
3. Integration of graphene into MEMS and NEMS for sensing applications
Sammanfattning : This thesis presents a novel approach to integrate chemical vapor deposition (CVD) graphene into silicon micro- and nanoelectromechanical systems (MEMS/NEMS) to fabricate different graphene based MEMS/NEMS structures and explore mechanical properties of graphene as well as their applications such as acceleration sensing, humidity sensing and CO2 sensing. The thesis also presents a novel method of characterization of CVD graphene grain boundary based defects. LÄS MER
4. Thin Film Electroacoustic Devices for Biosensor Applications
Sammanfattning : Biosensors are today important devices within various application areas. In this thesis a new type of label-free biosensor device is studied, which is fabricated using the same processes used for the fabrication of integrated circuits. This enables tighter integration and further sensors/biosensor miniaturization. LÄS MER
5. Electromechanical Instability in Suspended Nanowire-Based NEMS
Sammanfattning : "Nanoelectromechanical systems'' (NEMS) are a class of nanometer-sized mechanical structures coupled to electronic device of comparable dimensions. Their peculiar features make them interesting both from the technological and fundamental research viewpoints. LÄS MER