Sökning: "mems"

Visar resultat 1 - 5 av 70 avhandlingar innehållade ordet mems.

  1. 1. Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Umer Shah; KTH.; [2014]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems; MEMS; Radio frequency microelectromechanical systems; RF MEMS; Micromachined transmission line; Micromachining; Tuneable capacitor; Switched capacitor; Coupled-line coupler; Tuneable directional coupler; Intermodulation distortion; MEMS varactor; Two-tone IIP3 measurement; Passive components and circuits; Reliability; Magnetic materials; NiFe multilayer composite; Permeability; Permittivity; Micromachined inductors;

    Sammanfattning : This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. LÄS MER

  2. 2. Wafer-level heterogeneous integration of MEMS actuators

    Detta är en avhandling från Stockholm : KTH

    Författare :Stefan Braun; KTH.; [2010]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; transfer integration; packaging; assembly; wafer bonding; adhesive bonding; eutectic bonding; release etching; electrochemical etching; microvalves; microactuator; Shape Memory Alloy; SMA; NITINOL; TiNi; NiTi; cold-state reset; bias spring; stress layers; crossbar switch; routing; switch; switch array; electrostatic actuator; S-shaped actuator; zipper actuator; addressing; transfer stamping; blue tape; TECHNOLOGY Information technology Computer engineering; TEKNIKVETENSKAP Informationsteknik Datorteknik;

    Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER

  3. 3. MEMS-based electrochemical gas sensors and wafer-level methods

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Hithesh K Gatty; KTH.; [2015]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; MEMS; gas sensors; electrochemical; nitric oxide; hydrogen sulphide; nafion; nano;

    Sammanfattning : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. LÄS MER

  4. 4. GPS/IMU Integrated System for Land Vehicle Navigation based on MEMS

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Yueming Zhao; KTH.; [2011]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; GPS; IMU; MEMS; integration; Kalman filter; physical constraint; outlier;

    Sammanfattning : The Global Positioning System (GPS) and an Inertial Navigation System (INS)are two basic navigation systems. Due to their complementary characters in manyaspects, a GPS/INS integrated navigation system has been a hot research topic inthe recent decade. Both advantages and disadvantages of each individual systemare analyzed. LÄS MER

  5. 5. Monocrystalline-Silicon Based RF MEMS Devices

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Mikael Sterner; KTH.; [2012]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

    Sammanfattning : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. LÄS MER