Sökning: "Hithesh K Gatty"

Hittade 1 avhandling innehållade orden Hithesh K Gatty.

1. 1. MEMS-based electrochemical gas sensors and wafer-level methods

   Författare :Hithesh K Gatty; Göran Stemme; Roxhed Niclas; Anita Lloyd Spetz; KTH; []
   Nyckelord :MEMS; gas sensors; electrochemical; nitric oxide; hydrogen sulphide; nafion; nano;

   Sammanfattning : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. LÄS MER