Sökning: "RF MEMS"

Visar resultat 1 - 5 av 14 avhandlingar innehållade orden RF MEMS.

1. 1. Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining

   Författare :Umer Shah; Joachim Oberhammer; Raafat Mansour; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems; MEMS; Radio frequency microelectromechanical systems; RF MEMS; Micromachined transmission line; Micromachining; Tuneable capacitor; Switched capacitor; Coupled-line coupler; Tuneable directional coupler; Intermodulation distortion; MEMS varactor; Two-tone IIP3 measurement; Passive components and circuits; Reliability; Magnetic materials; NiFe multilayer composite; Permeability; Permittivity; Micromachined inductors;

   Sammanfattning : This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. LÄS MER

3. 2. Monocrystalline-Silicon Based RF MEMS Devices

   Författare :Mikael Sterner; Joachim Oberhammer; Roberto Sorrentino; KTH; []
   Nyckelord :RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

   Sammanfattning : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. LÄS MER

4. 3. Micromachined Gap Waveguide Devices

   Författare :Sofia Rahiminejad; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; MEMS; Gap waveguides; RF; High frequency; GHz; Waveguide;

   Sammanfattning : Gap waveguide technology is a new technology that is well suited for millimeter and submillimeter applications. Compared to conventional rectangular waveguides, this technology does not need any solid conductive walls to confine the wave by utilizing metamaterial surfaces such as "bed of nails" that creates an artificial magnetic conductive surface (AMC). LÄS MER

5. 4. Microsystem technology for microwave applications at frequencies above 100 GHz

   Författare :Sofia Rahiminejad; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Transitions; GHz; High frequency; RF; MEMS; Gap waveguides; Waveguide;

   Sammanfattning : The rapid development of wireless technology today shows an increasing need forelectromagnetic components operating at even higher frequencies. Higher frequencies offer wider bandwidth, higher spatial resolution and are needed for technologies such as automotive car radars, wireless media communication and body scanners. LÄS MER

7. 5. Novel RF MEMS Switch and Packaging Concepts

   Författare :Joachim Oberhammer; KTH; []
   Nyckelord :0-level packaging; adhesive bonding; BCB; benzocyclobutene; bond strength; contact printing; film actuator; glass lid encapsulation; glass lid packaging; helium leak test; hermetic packaging; hermeticity; high isolation switch; low stress silicon nitride; low volt; TECHNOLOGY; TEKNIKVETENSKAP;

   Sammanfattning : Radio-frequency microelectromechanical systems (RF~MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard clean-room manufacturing processes for high-volume integrated semiconductor circuits. LÄS MER