Sökning: "mems"

Visar resultat 6 - 10 av 85 avhandlingar innehållade ordet mems.

  1. 6. Additive Manufacturing and Integration of 3D MEMS using Ultrafast Lasers and Magnetic Assembly

    Författare :Simone Pagliano; Frank Niklaus; Göran Stemme; Gijs Krijnen; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; additive manufacturing; 3D printing; 3D micromachining; two-photon polymerization; MEMS; polyimide; ultrafast laser; laser micromachining; vertical integration; magnetic assembly; stochastic assembly; diminutive chips;

    Sammanfattning : The geometry of MEMS devices is limited by the technologies used to fabricate them. Today, microsystems are manufactured with patterning technologies that allow only for 2D and 2.5D geometries. LÄS MER

  3. 7. Monocrystalline-Silicon Based RF MEMS Devices

    Författare :Mikael Sterner; Joachim Oberhammer; Roberto Sorrentino; KTH; []
    Nyckelord :RF MEMS; radio frequency; microelectromechanical system; microsystem technology; monocrystalline silicon; switch; tuneable capacitor; high-impedace surface; phase shifter; rectangular waveguide; transmission line;

    Sammanfattning : This thesis presents novel radio-frequency microelectromechanical (RF MEMS) devices, for microwave and millimeter wave applications, designed for process robustness and operational reliability using monocrystalline silicon as structural material. Two families of RF MEMS devices are proposed. LÄS MER

  4. 8. Integration of diffractive, refractive and plasmonic optical structures in highly functional MEMS-based scanning and biosensing systems

    Författare :Karin Hedsten; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; localized surface plasmon resonance; replication; vertical-cavity surface-emitting laser; protein binding; silicon micromachining; polymer micro¬lens; biosensing; MEMS; diffractive microoptics; MOEMS; reflow;

    Sammanfattning : .... LÄS MER

  5. 9. Photonic MEMS for optical information technologies

    Författare :Carlos Errando-Herranz; Kristinn B. Gylfason; Wolfram Pernice; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Micro-electro-mechanical systems MEMS ; photonics; silicon photonics; photonic integrated circuits PIC ; lithium niobate photonics; ring resonator; polarization beam splitter PBS ; microfluidic integration; lab-on-chip LoC ; optical beam steering; nonlinear optics; Electrical Engineering; Elektro- och systemteknik; Fysik; Physics; Teknisk materialvetenskap; Materials Science and Engineering;

    Sammanfattning : Photonic integrated circuits (PICs) combine hundreds of optical components on a chip, and can enable fast communications, high-performance computing, and improved sensing. PICs, made by miniaturized optical waveguides, require many reconfigurable elements to enable programmable functionalities and to compensate for fabrication variations and environmental factors. LÄS MER

  7. 10. Key Technologies in Low-cost Integrated Vehicle Navigation Systems

    Författare :Yueming Zhao; Lars E. Sjöberg; Milan Horemuž; Hossein Nahavandchi; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; GPS; INS; MEMS; error modelling; integration structure; lane detection; camera motion; balance adjustment; sensor array;

    Sammanfattning : Vehicle navigation systems incorporate on-board sensors/signal receivers and provide necessary positioning and guidance information for land, marine, airborne and space vehicles. Among different navigation solutions, the Global Positioning System (GPS) and an Inertial Navigation System (INS) are two basic navigation systems. LÄS MER