Sökning: "MEMS"

Visar resultat 1 - 5 av 85 avhandlingar innehållade ordet MEMS.

  1. 1. Novel RF MEMS Devices Enabled by Three-Dimensional Micromachining

    Författare :Umer Shah; Joachim Oberhammer; Raafat Mansour; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems; MEMS; Radio frequency microelectromechanical systems; RF MEMS; Micromachined transmission line; Micromachining; Tuneable capacitor; Switched capacitor; Coupled-line coupler; Tuneable directional coupler; Intermodulation distortion; MEMS varactor; Two-tone IIP3 measurement; Passive components and circuits; Reliability; Magnetic materials; NiFe multilayer composite; Permeability; Permittivity; Micromachined inductors;

    Sammanfattning : This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. LÄS MER

  3. 2. Silicon photonic MEMS building blocks for low-power programmable circuits

    Författare :Pierre Edinger; Kristinn Gylfason; Frank Niklaus; Sangyoon Han; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Photonics; silicon photonics; MEMS; photonic MEMS; 3D printing; liquid crystals; programmable photonics; phase shifters; optical switches; ring resonators; Electrical Engineering; Elektro- och systemteknik;

    Sammanfattning : Silicon photonics, or the confinement and control of light in integrated silicon waveguides, has rapidly grown from research labs to high-end chips for telecommunications. With the associated improvements in waveguide performance, the technology is promising for a wide range of new applications, from computing to sensing. LÄS MER

  4. 3. Wafer-level heterogeneous integration of MEMS actuators

    Författare :Stefan Braun; Göran Stemme; Martin A. Schmidt; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; transfer integration; packaging; assembly; wafer bonding; adhesive bonding; eutectic bonding; release etching; electrochemical etching; microvalves; microactuator; Shape Memory Alloy; SMA; NITINOL; TiNi; NiTi; cold-state reset; bias spring; stress layers; crossbar switch; routing; switch; switch array; electrostatic actuator; S-shaped actuator; zipper actuator; addressing; transfer stamping; blue tape; Computer engineering; Datorteknik;

    Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER

  5. 4. MEMS-based electrochemical gas sensors and wafer-level methods

    Författare :Hithesh K Gatty; Göran Stemme; Roxhed Niclas; Anita Lloyd Spetz; KTH; []
    Nyckelord :MEMS; gas sensors; electrochemical; nitric oxide; hydrogen sulphide; nafion; nano;

    Sammanfattning : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. LÄS MER

  7. 5. GPS/IMU Integrated System for Land Vehicle Navigation based on MEMS

    Författare :Yueming Zhao; Lars Sjöberg; Milan Horemuž; Krzysztof Gajdamowicz; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; GPS; IMU; MEMS; integration; Kalman filter; physical constraint; outlier;

    Sammanfattning : The Global Positioning System (GPS) and an Inertial Navigation System (INS)are two basic navigation systems. Due to their complementary characters in manyaspects, a GPS/INS integrated navigation system has been a hot research topic inthe recent decade. Both advantages and disadvantages of each individual systemare analyzed. LÄS MER