Sökning: "electrochemical etching"

Visar resultat 1 - 5 av 20 avhandlingar innehållade orden electrochemical etching.

  1. 1. Heterogeneous Integration of Shape Memory Alloysfor High-Performance Microvalves

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Henrik Gradin; KTH.; [2012]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; wafer bonding; Au-Si; eutectic bonding; release etching; electrochemical etching; microvalves; microactuators; shape memory alloy; SMA; NiTinol; TiNi; NiTi; cold-state reset; bias spring; gate valves; wire bonding;

    Sammanfattning : This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets.The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. LÄS MER

  2. 2. Wafer-level heterogeneous integration of MEMS actuators

    Detta är en avhandling från Stockholm : KTH

    Författare :Stefan Braun; KTH.; [2010]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Microelectromechanical systems; MEMS; silicon; wafer-level; integration; heterogeneous integration; transfer integration; packaging; assembly; wafer bonding; adhesive bonding; eutectic bonding; release etching; electrochemical etching; microvalves; microactuator; Shape Memory Alloy; SMA; NITINOL; TiNi; NiTi; cold-state reset; bias spring; stress layers; crossbar switch; routing; switch; switch array; electrostatic actuator; S-shaped actuator; zipper actuator; addressing; transfer stamping; blue tape; TECHNOLOGY Information technology Computer engineering; TEKNIKVETENSKAP Informationsteknik Datorteknik;

    Sammanfattning : This thesis presents methods for the wafer-level integration of shape memory alloy (SMA) and electrostatic actuators to functionalize MEMS devices. The integration methods are based on heterogeneous integration, which is the integration of different materials and technologies. LÄS MER

  3. 3. Process Optimization of UV-Based Advanced Oxidation Processes in VOC Removal Applications

    Detta är en avhandling från Stockholm : KTH Royal Institute of Technology

    Författare :Francesco Montecchio; KTH.; [2018]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; AOP; UV; photocatalysis; ozone; air pollution; VOC abatement; reactor design; reactor modelling; photocatalyst support; electrochemical treatment; electrochemical etching; irradiation modelling; kinetics modelling; fluid dynamics simulation; prototype; full-scale; CFD simulation; Chemical Engineering; Kemiteknik;

    Sammanfattning : Air pollution is a major concern in developed countries due to its hazardous health effects. Recent studies by the WHO (World Health Organization) estimate that urban air pollution causes a number of diseases of the respiratory tract and is associated with 150,000 deaths each year. LÄS MER

  4. 4. Silicon Nanopore Arrays Fabrication and Applications for DNA Sensing

    Detta är en avhandling från KTH Royal Institute of Technology

    Författare :Miao Zhang; KTH.; [2018]
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; nanopore; array; electrochemical etching; DNA; optics; thermophoresis;

    Sammanfattning : Nanopore biomolecule sensing and sequencing has emerged as a simple but powerful tool for single molecule studies over the past two decades. By elec- trophoretically driving single molecules through a nanometer-sized pore, often sitting in an insulating membrane that separates two buffer solutions, ionic current blockades can be detected to reveal rich information of the molecules, such as DNA length, protein size and conformation, even nucleic acid se- quence. LÄS MER

  5. 5. Silicon nanofabrication by electron beam lithography and laser assisted electrochemical etching

    Detta är en avhandling från Kista : Mikroelektronik och informationsteknik

    Författare :Robert Juhasz; KTH.; [2002]
    Nyckelord :;

    Sammanfattning : .... LÄS MER