Sökning: "electron beam lithography"

Visar resultat 31 - 35 av 84 avhandlingar innehållade orden electron beam lithography.

1. 31. A Stacked Prism Lens Concept for Next-Generation Hard X-Ray Telescopes

   Författare :Wujun Mi; Mats Danielsson; Peter Nillius; Ralf K. Heilmann; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; focusing X-ray telescopes; Wolter-I optics; stacked prism lens; focused UV lithography; grayscale e-beam lithography; proximity effect correction; angular resolution; effective collecting area; röntgenteleskop; Wolter-I-optik; staplade prismalinser; fokuserad UV-litografi; elektronstråle-litografi; Fysik; Physics;

   Sammanfattning : Over the past half century, the focusing X-ray telescope has played a very prominent role in X-ray astronomy at the frontier of fundamental physics. The finer angular resolution and increased effective area have enabled more and more exciting discoveries and detailed studies of the high-energy universe, including the cosmic X-ray background (CXB) radiation, black holes in active galactic nuclei (AGN), galaxy clusters, supernova remnants, and so on. LÄS MER

3. 32. Nanofabrication of Zone Plates for Hard X-Ray Free-Electron Lasers

   Författare :Fredrik Uhlén; Ulrich Vogt; Thomas Wilhein; KTH; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; X-ray optics; Zone plates; Nanofabrication; X-ray free-electron lasers; Fysik; Physics;

   Sammanfattning : This Thesis describes the development of hard X-ray zone plates intended for focusing radiation at X-ray free-electron lasers (XFELs). XFELs provide unprecedented brightness and zone plates which are put in the intense X-ray beam are at risk of being damaged. LÄS MER

4. 33. Template-Based fabrication of Nanostructured Materials

   Författare :Anders Johansson; Mats Boman; Kornelius Nielsch; Uppsala universitet; []
   Nyckelord :Inorganic chemistry; Nanoparticles; nanotubes; anodic aluminium oxide; electroless deposition; ALD; Nb2O5; Prussian blue; palladium; copper; ion beam lithography; TiO2; SiO2; Oorganisk kemi;

   Sammanfattning : Materials prepared on the nanoscale often exhibit many different properties compared to the same materials in their bulk-state. Interest in nanostructured materials has increased because of these properties in fields such as microelectronics, catalysis, optics and sensors. LÄS MER

5. 34. Fabrication and Characterization of Aluminum Single Electron Transistors for Scanning Probes

   Författare :Henrik Brenning; Chalmers tekniska högskola; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; radio frequency single electron transistor; scanning probe; charging energy; nano fabrication; noise; scanning SET; SET; cantilever; AFM; RC-product; micro mechanics;

   Sammanfattning : The main objective of the work presented in this thesis was to fabricatescanning single electron transistor probes that operate at pumped liquid heliumtemperatures. This required single electron transistors (SETs) with low resistance (R_) and relatively high charging energy (E_C), and the technology tointegrate SETs onto probes. LÄS MER

7. 35. Experimental and theoretical investigations of electron-waveguide devices

   Författare :Jan-Olof Wesström; KTH; []
   Nyckelord :;

   Sammanfattning : This thesis treats electron-waveguide devices bothexperimentally and theoretically. A fabrication method forelectron-waveguide devices with trench-isolated in plane gateswas developed in the In0.53Ga0.47As/InP material system. LÄS MER