Sökning: "electron beam lithography"

Visar resultat 26 - 30 av 84 avhandlingar innehållade orden electron beam lithography.

  1. 26. Nanomechanical Studies and Applications of Cantilever Sensors

    Författare :Sara Ghatnekar-Nilsson; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Fysik; Physics; resonating; mass sensor; Young s modulus; CMOS; cantilevers; electron beam lithography; liquid;

    Sammanfattning : Different aspects of cantilevers to be used as sensors have been studied. Silicon cantilevers have been fabricated and integrated on CMOS chips using low-energy electron beam lithography in order to reduce the irradiation damage to the circuits. The released and integrated cantilevers have been tested and used as mass sensors in air. LÄS MER

  3. 27. Microfabrication for Biological Applications. Preparation, Characterization and Biological Evaluation

    Författare :Julie Gold; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; asbestos; surface spectroscopy; lithography; microfabrication; fibers; surface modification; biomaterials;

    Sammanfattning : Foreign materials are intentionally placed into patients in the form of medical devices for replacing or repairing damaged portions of the body. Materials also enter the body unintentionally in the form of particulates and fibers, and can then have damaging effects, such as the formation of disease or even cancer. LÄS MER

  4. 28. III-V Nanowire Solar Cells: Growth and Characterization

    Författare :Gaute Otnes; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Nanowire; Solar cell; Photovoltaic; Metal organic vapor phase epitaxy; Nanoimprint lithography; Electron beam induced current; Current-voltage characteristics; Doping; Fysicumarkivet A:2018:Otnes;

    Sammanfattning : To mitigate dangerous climate change, a transition to a new and sustainable energy system is needed. In this system, solar energy will need to be a key player. Prices of electricity made from solar cells have declined rapidly over the recent decades, making solar energy competitive in more markets. LÄS MER

  5. 29. Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences

    Författare :Patrick Carlberg; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Mikroelektronik; Microelectronics; Teknik; ballistic; Technological sciences; Fysik; Physics; nanowire; TBJ; cantilever; IDA electrode; sensors; life-science; lift-off; patterning media; anti-sticking; mold; stamp; process development; thermal imprint; nanoimprint lithography; Biotechnology; Bioteknik; nanotechnology; polymer; nanostructure;

    Sammanfattning : This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography (NIL), a relatively new nanofabrication tool capable of high resolution and high throughput. Surface structure creation with NIL is based on mechanical deformation of the patterning material. LÄS MER

  7. 30. Nanofabrication of Single Electron Transistors and Evaluation of Miniature Biosensors

    Författare :Linda G. M. Olofsson; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; miniaturization; nanoparticles; impedance; single electron tunneling; biosensors; surface plasmon resonance;

    Sammanfattning : This thesis deals with miniaturization in two different fields: electronics and biosensing. The first part deals with fabrication and measurements of two nanoscale structures - a self-assembled single electron transistor and a (potential) single junction device. LÄS MER