Sökning: "electron beam lithography"

Visar resultat 16 - 20 av 84 avhandlingar innehållade orden electron beam lithography.

1. 16. Thiol-ene Nanostructuring

   Författare :Reza Zandi Shafagh; Klas Tommy Haraldsson; Wouter van der Wijngaart; Niels Bent Larsen; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Nanostructuring; thiol-ene; OSTE; electron beam lithography EBL ; reaction injection molding RIM ; nanoimprint lithography NIL ; BioNEMS; QCM; digital bioassay; protein patterning; Lab-on-a-chip; polymer;

   Sammanfattning : Improving the health and well-being of humankind does not only constitutepart of our moral codes, but is also enlisted as the number three goal ofthe 2030 agenda for sustainable development set by the UN. Fulfilling suchobjective in the regions of resource-poor settings or for age groups with morevulnerability to infectious agents demands immediate actions. LÄS MER

3. 17. Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers

   Författare :Marc Beck; Fasta tillståndets fysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; electrochemistry; interdigitated array; anti-adhesion; anti-sticking; stamp; mold; monolayer deposition; Fysik; post-imprint processes; Physics; transducer; nanoimprint lithography; sensor; Fysicumarkivet A:2003:Beck;

   Sammanfattning : This thesis gives an overview about the current status of nanoimprint lithography, a relatively new nanofabrication tool. The technology is capable for parallel mass production of nm-structured features having a resolution below 10 nm and is usable with high throughput on full wafer scale. LÄS MER

4. 18. Fabrication of Low-Dimensional Structures in III-V Semiconductors

   Författare :Ivan Maximov; Fasta tillståndets fysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; III-V semiconductors; plasma; etching; aerosol; lithography; quantum dots; quantum well wires; quantum point contact; damage; luminescence; Fysicumarkivet A:1997:Maximov; Halvledarfysik; Semiconductory physics;

   Sammanfattning : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. LÄS MER

5. 19. Low and High Energy Ion Beams in Nanotechnology

   Författare :Thomas Winzell; Kärnfysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; ion implantation; magnetic materials; ERDA; nanometer structures; Nuclear physics; MeV Ions; lithography; Kärnfysik; Fysicumarkivet A:2000:Winzell;

   Sammanfattning : In this thesis, two ways of fabrication of nanometer-sized semiconductor features are presented. Low Energy Ion Implantation (LEII) has been used to create shallow (sub-50 nm) and laterally small (5 m m – 200 nm) features by 10 keV As+ doping of B background doped Si. LÄS MER

7. 20. Electrochemical and mechanical thin film sensors

   Författare :Lars Henrik Skjolding; Fasta tillståndets fysik; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; vancomycin; electrochemistry; transducer; DUV lithography; nanoimprint lithography; thin film; cantilever; sensor; interdigitated electrode; electrostatic interaction; mix-and-match processing; bacteria; Fysicumarkivet A:2010:Skjolding;

   Sammanfattning : This thesis focuses on the study of thin-film sensor technologies, novel microfabrication technologies, and thin-film technology in general. The work discusses electrochemical sensors and mechanical sensor technologies as well as fabrication strategies for them. LÄS MER