Sökning: "electron beam lithography"

Visar resultat 11 - 15 av 84 avhandlingar innehållade orden electron beam lithography.

  1. 11. Advances in Soft Matter Nanofabrication

    Författare :Mehrnaz Shaali; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; photolithography; negative e-beam resist; monolayer; confocal microscopy; Teflon AF; KPFM; DNA origami; cells; lipid nanotube; AFM; double bilayer; Phospholipid; electron beam lithography;

    Sammanfattning : The focus of this thesis is placed on the fabrication of engineered nanodevices for the manipulation of soft matter thin films. By combining top-down micro- and nanofabrication approaches with bottom-up self-assembly strategies, new research platforms were developed, tested and characterized. LÄS MER

  3. 12. Towards the Integration of Carbon nanostructures into CMOS technology

    Författare :Mohammad Kabir; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; transmission electron microscopy TEM .; chemical vapour deposition CVD ; electron beam lithography EBL ; carbon nanotube CNT ; silicidation; atomic force microscopy AFM ; carbon nanofiber CNF ; Complementary metal oxide semiconductor CMOS ; dc-glow discharge plasma; growth mechanism; metal catalyst; scanning electron microscopy SEM ;

    Sammanfattning : Relentless efforts for miniaturization of traditional complementary metal oxide semiconductor (CMOS) devices have reached the limit where the device characteristics are governed by quantum phenomena which are difficult to control. This engendered a need for finding alternative new materials that can be engineered to fabricate devices that will possess at least the same or even better performance than existing CMOS devices. LÄS MER

  4. 13. Two-Dimensional Photonic Crystals in InP-based Materials

    Författare :Mikaël Mulot; KTH; []
    Nyckelord :Photonic crystals; photonic bandgap materials; indium phosphide; dry etching; chemically assisted ion beam etching; reactive ion etching; electron beam lithography; photonic integrated circuits; optical waveguides; resonant cavities; optical filterin;

    Sammanfattning : Photonic crystals (PhCs) are structures periodic in thedielectric constant. They exhibit a photonic bandgap, i.e., arange of wavelengths for which light propagation is forbidden. LÄS MER

  5. 14. High efficiency grating-coupled surface-emitting semiconductor lasers

    Författare :Niklas Eriksson; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; diffraction grating; chemically assisted ion beam etching; blazed grating; integrated optics; multilayer substrate reflector; semiconductor laser; grating-coupled surface-emitting laser; electron-beam lithography; waveguide grating coupler; nenofabrication;

    Sammanfattning : .... LÄS MER

  7. 15. Heterostructure Field Effect Transistors and Millimeter Wave Integrated Circuits

    Författare :Niklas Rorsman; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; subharmonic; resistive mixer; Modulation Doped Field Effect Transistor MODFET ; heterostructure field effect transistor HFET ; monolithic microwave integrated circuits MMIC ; frequency multiplier; amplifier; III-V semiconductor; small signal model; electron beam lithography; High Electron Mobility Transistor HEMT ; large signal model; pseudomorphic;

    Sammanfattning : This thesis deals with the research and development of HFETs and HFET based circuits. One of the main aims of the work presented in this thesis has been to develop processes to fabricate state of the art devices and circuits. LÄS MER