Sökning: "dry etching"

Visar resultat 21 - 25 av 26 avhandlingar innehållade orden dry etching.

  1. 21. Silicon Carbide High Temperature Photodetectors and Image Sensor

    Författare :Shuoben Hou; Mikael Östling; Carl-Mikael Zetterling; Per-Erik Hellström; Anthony O'Neill; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Silicon Carbide SiC ; high temperature; photodetector; photodiode; phototransistor; ultraviolet UV ; transistor-transistor logic TTL ; bipolar junction transistor BJT ; integrated circuit IC ; pixel sensor; image sensor; Informations- och kommunikationsteknik; Information and Communication Technology;

    Sammanfattning : Silicon Carbide (SiC) has the advantages of ultraviolet (UV) sensing and high temperature characteristics because of its wide band gap. Both merits make SiC photodetectors very attractive in astronomy, oil drilling, combustion detection, biology and medical applications. LÄS MER

  3. 22. Applications of active materials

    Författare :Erik Edqvist; Greger Thornell; Bengt Lundberg; Edwin Jäger; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Energy efficient; microsystem; resonating cantilevers; microactuators; P VDF-TrFE ; surface mounting assembly; multi layers; flexible printed circuit board; conveyer; three legged; Materials science; Teknisk materialvetenskap; materialvetenskap; Materials Science;

    Sammanfattning : Energy efficiency is a vital key component when designing and miniaturizing self sustained microsystems. The smaller the system, the smaller is the possibility to store enough stored energy for a long and continuous operational time. LÄS MER

  4. 23. On the role of microstructure in wear of nanostructured carbide-free bainitic steels

    Författare :Pouria Valizadeh Moghaddam; Jens Hardell; Esa Vuorinen; Braham Prakash; Mikael Olsson; Luleå tekniska universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Tribology; Wear; Microstructure; Carbide-free bainite; Nanostructured; Retained austenite; Steel; High temperature; Machine Elements; Maskinelement;

    Sammanfattning : The significance of steel production for the development of sustainable society and economy is immense. Today’s fast growing global economy poses an increasing demand for improving the properties of steel. LÄS MER

  5. 24. High resolution electrical characterization of III-V materials and devices

    Författare :Olivier Douheret; Srinivasan Anand; Wilfried Vandervorst; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrical engineering; condensed matter; electrics; electrical; materials science; Elektroteknik; elektronik och fotonik; Electrical engineering; electronics and photonics; Elektroteknik; elektronik och fotonik;

    Sammanfattning : The continuing shrinkage of semiconductor devices towards nanoscale features and increased functionality has prompted a strong need for high-resolution characterization tools capable of mapping the electrical properties with nanoscale lateral resolution. In this regard, scanning capacitance microscopy (SCM) scanning spreading resistance microscopy (SSRM) and Kelvin probe force microscopy (KPFM) have emerged as powerful techniques. LÄS MER

  7. 25. Semiconductor Lasers with Gratings Defined by Electron Beam Lithography

    Författare :Torgil Kjellberg; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; lasers; field-stitching errors; single-mode stability; fiber-optic communication;

    Sammanfattning : This thesis deals with the fabrication and characterization of semiconductor lasers with gratings defined by electron-beam lithography (EBL). Both distributed-feedback (DFB) lasers for fiber-optic communication and grating-surface-emitting (GSE) lasers suitable for a number of novel applications, from free-space communication to optical processing, are treated. LÄS MER