Sökning: "dry etching"

Visar resultat 11 - 15 av 26 avhandlingar innehållade orden dry etching.

  1. 11. Micromachined epitaxial colossal mognetoresistors for uncooled infrared bolometer

    Författare :Joo-Hyung Kim; Alexander M. Grishin; Yael Nemirosky; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; La0.67 Sr; Ca 0.33MnO3 LSCMO ; La0.67Sr0.33MnO3 LSMO ; Electrophysics; Elektrofysik;

    Sammanfattning : High quality perovskite manganites, La1-xAxMnO3 (A = Ca, Sr, Ba) are very attractive materials due to their great application potential for magnetic memory, uncooled infrared (IR) microbolometer and spintronics devices. This thesis presents studies of the growth and material characterization (including structural, electrical, magnetic and noise) of epitaxial manganite films on Si and GaAs. LÄS MER

  3. 12. Experiments and modeling of thin film processes

    Författare :Lars B. Jonsson; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Solid State Physics; fasta tillståndets fysik;

    Sammanfattning : The processes employed in modern microelectronics are very sophisticated, often representing a complex combination of physical and chemical components with a large number of parameters. Our knowledge and understanding about these processes are often limited; their description is mostly empirical or semi-empirital at best. LÄS MER

  4. 13. Design and process issues of junction- and ferroelectric-field effect transistors in silicon carbide

    Författare :Sang-Mo Koo; KTH; []
    Nyckelord :;

    Sammanfattning : In today’s solid-state electronics, Si and SiO2 are thedominant materials used. However, new materials such as SiC orferroelectrics are required for some special applications sincesuperior characteristics can be achieved in electronic devices. LÄS MER

  5. 14. Quantum electronic transport in low-dimensional semiconductors

    Författare :Heiner Linke; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; quantum transport; two-dimensional electron gas; contact-free characterisation; ballistic transport; mesoscopic; electron billiard; quantum dot; electron-electron interaction; non-linear; phase breaking; Halvledarfysik; Fysicumarkivet A:1997:Linke; non-symmetric conductio; Semiconductory physics; low-dimensional structures;

    Sammanfattning : Electronic transport is studied at low temperatures in two-dimensional electron gases (2DEGs) and in mesoscopic semiconductor microstructures. The method of microwave-detection of the Shubnikov-de Haas effect for the contact-free characterisation of transport properties of 2DEGs is explored using both magnetic-field modulation and light-induced carrier modulation. LÄS MER

  7. 15. Production and biomedical use of non-conventional positron emitters

    Författare :Vladimir Tolmachev; Uppsala universitet; []
    Nyckelord :MEDICIN OCH HÄLSOVETENSKAP; MEDICAL AND HEALTH SCIENCES; Oncology; Onkologi; Oncology; Onkologi; Biomedical Radiation Science; biomedicinsk strålningsvetenskap;

    Sammanfattning : Positron Emission Tomography (PET) is a powerful diagnostic tool. So far, it has mainly been associated with the use of short-lived positron emitters with half-lives shorter than 2 h, like 11C and 18F. LÄS MER