Sökning: "Wilfried Vandervorst"
Hittade 1 avhandling innehållade orden Wilfried Vandervorst.
1. High resolution electrical characterization of III-V materials and devices
Sammanfattning : The continuing shrinkage of semiconductor devices towards nanoscale features and increased functionality has prompted a strong need for high-resolution characterization tools capable of mapping the electrical properties with nanoscale lateral resolution. In this regard, scanning capacitance microscopy (SCM) scanning spreading resistance microscopy (SSRM) and Kelvin probe force microscopy (KPFM) have emerged as powerful techniques. LÄS MER
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