Sökning: "sputter"

Visar resultat 21 - 25 av 80 avhandlingar innehållade ordet sputter.

1. 21. Epitaxial aluminum nitride thin films on 6H-silicon carbide, grown by magnetron sputter deposition

   Författare :Sukkaneste Tungasmita; Linköpings universitet; []
   Nyckelord :;

   Sammanfattning : The research presented in this thesis is focused on epitaxial wurtzite-structure Aluminum Nitride (AlN) thin film synthesis, by ultra-high-vacuum (UHV) de magnetron sputter deposition, on Silicon Carbide (6H-SiC) substrates. The emphasis of the work has been put on controlling the growth and quality of the films to be able to use this material in electronic device applications. LÄS MER

3. 22. Thin metal films on weakly-interacting substrates : Nanoscale growth dynamics, stress generation, and morphology manipulation

   Författare :Andreas Jamnig; Kostas Sarakinos; Gregory Abadias; Gregory Thompson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Thin films; magnetron sputter-deposition; in situ and real-time characterization; early film growth stages; residual stress; manipulation of morphology; Couches minces; pulvérisation magnétron; caractérisation in situ en temps réel; premiers stades de croissance; contraintes résiduelles; manipulation de morphologie;

   Sammanfattning : Vapor-based growth of thin metal films with controlled morphology on weakly-interacting substrates (WIS), including oxides and van der Waals materials, is essential for the fabrication of multifunctional metal contacts in a wide array of optoelectronic devices. Achieving this entails a great challenge, since weak film/substrate interactions yield a pronounced and uncontrolled 3D morphology. LÄS MER

4. 23. Electrochromic Nickel – Tungsten Oxides : Optical, Electrochemical and Structural Characterization of Sputter-deposited Thin Films in the Whole Composition Range

   Författare :Sara Green; Gunnar Niklasson; Claes-Göran Granqvist; Esteban Avendaño; Aline Rougier; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrochromism; Nickel oxide; Tungsten oxide; Lithium intercalation; Sputtering; Thin films; Nanostructures; Optical properties; Solid State Physics; Fasta tillståndets fysik;

   Sammanfattning : This thesis investigates the electrochromic NixW1-x oxide thin film system, where 0 < x < 1. The thin films were deposited by reactive DC magnetron co-sputtering from one Ni and one W metal target. In addition, Ni oxide was deposited with water vapor added to the sputtering gas. LÄS MER

5. 24. Self-Assembled and Selective-Area Growth of Group III-Nitride Semiconductor Nanorods by Magnetron Sputter Epitaxy

   Författare :Elena Alexandra Serban; Ching-Lien Hsiao; Jens Birch; Per Persson; Lars Hultman; Eva Monroy; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The III-nitride semiconductor family includes gallium nitride (GaN), aluminum nitride (AlN), indium nitride (InN), and the related ternary and quaternary alloys. The research interest on this group of materials is sparked by the direct bandgaps, and excellent physical and chemical properties. LÄS MER

7. 25. Transparent Conductive Tin Doped Indium Oxide : Characterisation of Thin Films Made by Sputter Deposition with Silver Additive and by Spin Coating from Nanoparticle Dispersions

   Författare :Annette Hultåker; Peter van Nijnatten; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Materialvetenskap; Materials science; Teknisk materialvetenskap; Solid State Physics; fasta tillståndets fysik;

   Sammanfattning : Thin films of tin doped indium oxide (ITO) were prepared by two different methods: by sputter deposition with silver additive and by spin coating of a nanoparticle dispersion.ITO films doped with ≤ 20 at% of silver were prepared either as homogenous blends of ITO and silver or as intermixed layers. LÄS MER