Sökning: "metal-assisted chemical etching"

Hittade 3 avhandlingar innehållade orden metal-assisted chemical etching.

  1. 1. Metal-assisted chemical etching for nanofabrication of hard X-ray zone plates

    Författare :Rabia Akan; Ulrich Vogt; Muhammet Toprak; Carmen Vogt; Lucia Romano; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; metal-assisted chemical etching; zone plate; high-aspect ratio; silicon; nanostructures; Material and Nano Physics; Material- och nanofysik; Optik och fotonik; Optics and Photonics;

    Sammanfattning : Hard X-ray scanning microscopes, or nanoprobes, make it possible to image samples and probe their chemical, elemental and structural properties at nanoscale resolution. This is enabled by the use of nanofocusing optics. Commonly used optics in nanoprobes for high resolution X-ray experiments are zone plates. LÄS MER

  3. 2. High-Aspect Ratio Nanofabrication for Hard X-Ray Zone Plates

    Författare :Karolis Parfeniukas; Ulrich Vogt; Hans Hertz; Anne Sakdinawat; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; nanofabrication; x-ray optics; zone plate; tungsten; silicon; reactive ion etching; metal-assisted chemical etching; Ronchi test; Fysik; Physics;

    Sammanfattning : Hard x-ray nanoimaging enables structural investigations of new materials for many applications. For high-resolution experiments, zone plate x-ray optics are commonly chosen.Two methods of zone plate nanofabrication are presented in this thesis.Zone plates are circular diffraction gratings with radially decreasing grating period. LÄS MER

  4. 3. Nanofabrication processes for high-aspect ratio X-ray zone plates

    Författare :Hanna Ohlin Ohlin; Ulrich Vogt; Matias Kagias; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Physics; Fysik;

    Sammanfattning : The field of nanofabrication is vast, and there are many methods available to facilitate the fabrication of different types of structures. Nanostructured materials make up critical infrastructure in fields like medical technology, energy storage and production, computer science and more. LÄS MER