Sökning: "Karolis Parfeniukas"

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  1. 1. High-Aspect Ratio Nanofabrication for Hard X-Ray Zone Plates

    Författare :Karolis Parfeniukas; Ulrich Vogt; Hans Hertz; Anne Sakdinawat; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; nanofabrication; x-ray optics; zone plate; tungsten; silicon; reactive ion etching; metal-assisted chemical etching; Ronchi test; Fysik; Physics;

    Sammanfattning : Hard x-ray nanoimaging enables structural investigations of new materials for many applications. For high-resolution experiments, zone plate x-ray optics are commonly chosen.Two methods of zone plate nanofabrication are presented in this thesis.Zone plates are circular diffraction gratings with radially decreasing grating period. LÄS MER