Sökning: "high power impulse magnetron sputtering"

Visar resultat 1 - 5 av 36 avhandlingar innehållade orden high power impulse magnetron sputtering.

  1. 1. Fundamentals of High Power Impulse Magnetron Sputtering

    Författare :Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

    Sammanfattning : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. LÄS MER

  3. 2. Modeling High Power Impulse Magnetron Sputtering Discharges

    Författare :Chunqing Huo; Nils Brenning; Svetlana Ratynskaia; James Bradley; KTH; []
    Nyckelord :;

    Sammanfattning : HiPIMS, high power impulse magnetron sputtering, is a promising technology that has attracted a lot of attention ever since its appearance. A time-dependent plasma discharge model has been developed for the ionization region in HiPIMS discharges. LÄS MER

  4. 3. High power impulse magnetron sputtering under industrial conditions

    Författare :Mattias Samuelsson; Ulf Helmersson; Torbjörn Joelsson; Hans Högberg; Bengt Wälivaara; Tomáš Kubart; Linköpings universitet; []
    Nyckelord :NATURAL SCIENCES; NATURVETENSKAP;

    Sammanfattning : In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the sputtered material. LÄS MER

  5. 4. Plasma properties in high power impulse magnetron sputtering

    Författare :Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

    Sammanfattning : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). LÄS MER

  7. 5. Reactive High Power Impulse Magnetron Sputtering of Metal Oxides

    Författare :Montri Aiempanakit; Ulf Helmersson; Tomas Kubart; Straňák Vítězslav; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research is to contribute towards understanding of the fundamental mechanisms governing a reactive HiPIMS process and to investigate their implications on the film growth. LÄS MER