Sökning: "Straňák Vítězslav"
Hittade 1 avhandling innehållade orden Straňák Vítězslav.
Sammanfattning : The work presented in this thesis deals with reactive magnetron sputtering processes of metal oxides with a prime focus on high power impulse magnetron sputtering (HiPIMS). The aim of the research is to contribute towards understanding of the fundamental mechanisms governing a reactive HiPIMS process and to investigate their implications on the film growth. LÄS MER