Sökning: "Johan Böhlmark"

Hittade 2 avhandlingar innehållade orden Johan Böhlmark.

1. 1. Fundamentals of High Power Impulse Magnetron Sputtering

   Författare :Johan Böhlmark; Ulf Helmersson; André Anders; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Plasma; Pulsed plasma; High Power Pulsed Magnetron Sputtering; Plasma Characterization; Physics; Fysik;

   Sammanfattning : In plasma assisted thin film growth, control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias or a magnetic field. Ions may be accelerated by an applied potential, whereas neutral particles may not. LÄS MER

3. 2. The effect of extreme power densities applied to a planar magnetron

   Författare :Johan Böhlmark; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : In plasma assisted thin film growth control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias. ions may be accelerated by an applied potential, whereas neutral particles may not. LÄS MER