Sökning: "Jon Tomas Gudmundsson"

Hittade 2 avhandlingar innehållade orden Jon Tomas Gudmundsson.

1. 1. Silicon Oxynitride Thin Films Grown by Reactive HiPIMS

   Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Jón Tómas Guðmundsson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. LÄS MER

3. 2. Plasma properties in high power impulse magnetron sputtering

   Författare :Daniel Lundin; Ulf Helmersson; Jon Tomas Gudmundsson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; HPPMS; plasma; plasma transport; plasma instabilities; Plasma physics; Plasmafysik;

   Sammanfattning : The work presented in this thesis involves experimental and theoretical studies related to plasma properties in high power impulse magnetron sputtering (HiPIMS), and more specifically plasma transport. HiPIMS is an ionized PVD method based on conventional direct current magnetron sputtering (dcMS). LÄS MER