Sökning: "Bengt Wälivaara"
Hittade 2 avhandlingar innehållade orden Bengt Wälivaara.
1. Fundamental aspects of HiPIMS under industrial conditions
Sammanfattning : Fundamental aspects of the high power impulse magnetron sputtering (HiPIMS) process and its implication for film growth under industrial conditions have been studied. The emerging HiPIMS technique exhibits a higher plasma density and an enhanced degree of ionisation of sputtered material as compared to conventional direct current magnetron sputtering (DCMS). LÄS MER
2. High power impulse magnetron sputtering under industrial conditions
Sammanfattning : In this thesis, the recent development step of magnetron sputtering, termed high power impulse magnetron sputtering (HiPIMS) has been studied. Compared to conventional magnetron sputtering HiPIMS provides a higher plasma density which can ionise the sputtered material. LÄS MER