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Visar resultat 16 - 20 av 138 avhandlingar som matchar ovanstående sökkriterier.

  1. 16. Applications of Artificial Microcavities in Wafer Bonded Silicon

    Författare :Zhaohua Xiao; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

    Sammanfattning : A novel sensor structure has been investigated and extensively studied. The device can be used as a pressure sensor, a voltage measuring device and as an optical modulator. The sensor was made using thermal bonding and micromachining techniques. LÄS MER

  3. 17. MEMS-based electrochemical gas sensors and wafer-level methods

    Författare :Hithesh K Gatty; Göran Stemme; Roxhed Niclas; Anita Lloyd Spetz; KTH; []
    Nyckelord :MEMS; gas sensors; electrochemical; nitric oxide; hydrogen sulphide; nafion; nano;

    Sammanfattning : This thesis describes novel microel ectromechanical system (MEMS) based electrochemical gas sensors and methods of fabrication.This thesis presents the research in two parts. In the first part, a method to handle a thin silicon wafer using an electrochemically active adhesive is described. LÄS MER

  4. 18. Wafer-level 3-D CMOS Integration of Very-large-scale Silicon Micromirror Arrays and Room-temperature Wafer-level Packaging

    Författare :Martin Lapisa; Frank Niklaus; Olav Solgaard; KTH; []
    Nyckelord :;

    Sammanfattning : This thesis describes the development of wafer-level fabrication and packaging methods for micro-electromechanical (MEMS) devices, based on wafer-bonding.The first part of the thesis is addressing the development of a wafer-level technology that allows the use of high performance materials, such as monocrystalline silicon, for MEMS devices that are closely integrated on top of sensitive integrated circuits substrates. LÄS MER

  5. 19. Processing technologies for long-wavelength vertical-cavity lasers

    Författare :Fredrik Salomonsson; KTH; []
    Nyckelord :VCSEL; vertical-cavity laser; semiconductor laser; long-wavelength; DBR; oxidation; wafer fusion; InGaAs; semiconductor processing;

    Sammanfattning : Vertical-cavity surface-emitting lasers (VCSELs) areattractive as potential inexpensive high-performance emittersfor fibre-optical communication systems. Their surface-normalemission together with the small dimensions are beneficial forlow-cost fabrication since it allows on-wafer testing,simplified packaging and effective fibre-coupling. LÄS MER

  7. 20. The Buried Oxide of Silicon on Insulator Materials

    Författare :Per Ericsson; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; oxide defects; internal oxidation; aluminum oxide; wafer bonding; SOI; silicon on insulator; buried oxide;

    Sammanfattning : The buried oxide of silicon on insulator (SOI) wafers plays an important role in the operation of electronic devices made on such materials. The presence of defects in the buried oxide can seriously degrade the performance of a circuit. LÄS MER