Sökning: "tantalum oxide"
Visar resultat 1 - 5 av 12 avhandlingar innehållade orden tantalum oxide.
1. CVD and ALD of Group IV- and V-Oxides for Dielectric Applications
Sammanfattning : Due to the constantly decreasing dimensions of electronic devices, the conventional dielectric material in transistors and capacitors, SiO2, has to be replaced by a material with higher dielectric constant. Some of the most promising candidates are tantalum oxide,Ta2O5, zirconium oxide, ZrO2 and hafnium oxide, HfO2. LÄS MER
2. Employing Metal Iodides and Oxygen in ALD and CVD of Functional Metal Oxides
Sammanfattning : Many materials exhibit interesting and novel properties when prepared as thin films. Thin film metal oxides have had an impact on the technological progress of the microelectronics mainly due to their electrical and optical properties. LÄS MER
3. Electrochromic Properties of Iridium Oxide Based Thin Films
Sammanfattning : Electrochromic iridium oxide (IrOx) and iridium-tantalum oxide (IrTaOx) thin films were prepared by reactive magnetron sputtering. Composition, density, and structure were determined using Rutherford backscattering spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and electron energy loss spectroscopy. LÄS MER
4. Investigation of Novel Metal Gate and High-κ Dielectric Materials for CMOS Technologies
Sammanfattning : The demands for faster, smaller, and less expensive electronic equipments are basically the driving forces for improving the speed and increasing the packing density of microelectronic components. Down-scaling of the devices is the principal method to realize these requests. LÄS MER
5. The structural chemistry of niobium and tantalum oxide fluorides containing divalent lead
Sammanfattning : The coordination about divalent lead in oxides and fluorides if reviewed with special reference to the stereochemical activity of the lone pair. An attempt has been made to identify fluorine atoms by using bond strength calculations. LÄS MER