Sökning: "Jonas Sundqvist"

Hittade 1 avhandling innehållade orden Jonas Sundqvist.

  1. 1. Employing Metal Iodides and Oxygen in ALD and CVD of Functional Metal Oxides

    Detta är en avhandling från Uppsala : Acta Universitatis Upsaliensis

    Författare :Jonas Sundqvist; Uppsala universitet.; [2003]
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Inorganic chemistry; CVD; ALD; tantalum oxide; hafnium oxide; tin oxide; epitaxy; Ta2O5; HfO2; SnO2; XRD; Oorganisk kemi; NATURAL SCIENCES Chemistry Inorganic chemistry; NATURVETENSKAP Kemi Oorganisk kemi; Inorganic Chemistry; Oorganisk kemi;

    Sammanfattning : Many materials exhibit interesting and novel properties when prepared as thin films. Thin film metal oxides have had an impact on the technological progress of the microelectronics mainly due to their electrical and optical properties. LÄS MER