Sökning: "reactive sputtering"

Visar resultat 11 - 15 av 96 avhandlingar innehållade orden reactive sputtering.

1. 11. Reactive Sputtering of Complex Multi-component Nitride Thin Films

   Författare :Kristina von Fieant; Erik Lewin; Ulf Jansson; Jean-Francois Pierson; Uppsala universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The ever-increasing demand on improvement of protective nitride thin films has led to an expansion of the research field into multi-element based materials. The work in this thesis has focused on exploring new complex, multi-component nitride thin films based on three different material systems: Al-Ge-N, Hf-Nb-Ti-V-Zr-N and Al-Cr-Nb-Y-Zr-N. LÄS MER

3. 12. Electrochromic Nickel – Tungsten Oxides : Optical, Electrochemical and Structural Characterization of Sputter-deposited Thin Films in the Whole Composition Range

   Författare :Sara Green; Gunnar Niklasson; Claes-Göran Granqvist; Esteban Avendaño; Aline Rougier; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electrochromism; Nickel oxide; Tungsten oxide; Lithium intercalation; Sputtering; Thin films; Nanostructures; Optical properties; Solid State Physics; Fasta tillståndets fysik;

   Sammanfattning : This thesis investigates the electrochromic NixW1-x oxide thin film system, where 0 < x < 1. The thin films were deposited by reactive DC magnetron co-sputtering from one Ni and one W metal target. In addition, Ni oxide was deposited with water vapor added to the sputtering gas. LÄS MER

4. 13. Alumina Thin Film Growth: Experiments and Modeling

   Författare :Erik Wallin; Ulf Helmersson; Denis Music; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Alumina; Reactive sputtering; Phase formation; Residual water; Surface adsorption; Density functional theory; Material physics with surface physics; Materialfysik med ytfysik;

   Sammanfattning : The work presented in this thesis deals with experimental and theoretical studies related to the growth of crystalline alumina thin films. Alumina, Al2O3, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. LÄS MER

5. 14. Advanced Thin Film Electroacoustic Devices

   Författare :Johan Bjurström; Ilia Katardjiev; Paul Muralt; Uppsala universitet; []
   Nyckelord :Technology; aluminum nitride; FBAR; shear mode resonator; lamb wave devices; liquid sensor; biosensor; temperature compensation; reactive sputtering; TEKNIKVETENSKAP; TECHNOLOGY; TEKNIKVETENSKAP;

   Sammanfattning : The explosive development of the telecom industry and in particular wireless and mobile communications in recent years has lead to a rapid development of new component and fabrication technologies to continually satisfy the mutually exclusive requirements for better performance and miniaturization on the one hand and low cost on the other. A fundamental element in radio communications is time and frequency control, which in turn is achieved by high performance electro-acoustic components made on piezoelectric single crystalline substrates. LÄS MER

7. 15. Synthesis of Thin Piezoelectric AlN Films in View of Sensors and Telecom Applications

   Författare :Milena De Albuquerque Moreira; Ilia Dr.; Ioshiaki Dr.; Ricardo Cotrin; Uppsala universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Aluminum nitride; reactive sputtering; c-axis oriented films; tilted films; electroacoustic devices; piezoelectric materials; Aluminum Scandium Nitride; HiPIMS; high-k dielectric; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Sammanfattning : The requirements of the consumer market on high frequency devices have been more and more demanding over the last decades. Thus, a continuing enhancement of the devices’ performance is required in order to meet these demands. In a macro view, changing the design of the device can result in an improvement of its performance. LÄS MER