Sökning: "c-axis oriented films"

Visar resultat 1 - 5 av 18 avhandlingar innehållade orden c-axis oriented films.

  1. 1. Synthesis of Thin Piezoelectric AlN Films in View of Sensors and Telecom Applications

    Författare :Milena De Albuquerque Moreira; Ilia Dr.; Ioshiaki Dr.; Ricardo Cotrin; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Aluminum nitride; reactive sputtering; c-axis oriented films; tilted films; electroacoustic devices; piezoelectric materials; Aluminum Scandium Nitride; HiPIMS; high-k dielectric; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Sammanfattning : The requirements of the consumer market on high frequency devices have been more and more demanding over the last decades. Thus, a continuing enhancement of the devices’ performance is required in order to meet these demands. In a macro view, changing the design of the device can result in an improvement of its performance. LÄS MER

  3. 2. Electro-Optical Na0.5K0.5NbO3 Films

    Författare :Mats Blomqvist; Alexander M. Grishin; Prof. Bruce Wessels; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Functional materials; ferroelectrics; sodium potassium niobates; thin films; rf-magnetron sputtering; waveguiding; refractive index; prism-coupling; electro-optic effects; dielectric tunability; Funktionella material; Functional materials; Funktionella material;

    Sammanfattning : Ferroelectric oxides are a group of advanced electronic materials with a wide variety of properties useful in applications such as memory devices, resonators and filters, infrared sensors, microelectromechanical systems, and optical waveguides and modulators.Among the oxide perovskite-structured ferroelectric thin film materials, sodium potassium niobate or Na0. LÄS MER

  4. 3. Growth and microstructure of reactive sputter deposited boron nitride : carbon (BN:C) thin films

    Författare :Mats P. Johansson; Linköpings universitet; []
    Nyckelord :;

    Sammanfattning : Growth, microstructure and mechanical properties of boron nitride: carbon (BN:C) have been studied in films prepared by reactive r.f. diode sputter deposition as well as by reactive unbalanced d.c. LÄS MER

  5. 4. Sputtered Carbon Nitride Thin Films

    Författare :Niklas Hellgren; Bernd Schultrich; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : The relation between the growth conditions and the film structure and properties of reactively magnetron sputtered carbon nitride CNx (0 ≤ x ≤ 0.6) thin films has been studied. The growth of CNx films has been studied when varying the process parameters, such as substrate temperature, N2 (partial) pressure and ion flux. LÄS MER

  7. 5. Photoresponse of Patterned YBa2Cu3O7-x Thin Films

    Författare :Martin Danerud; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : The first object of this work was to develop YBa2Cu3O7-x (YBCO) thin films. Initially, Y, BaF2 and Cu were coevaporated with the substrate temperature (TS) 400 °C and the oxygen pressure (pO2) 5 x 10-5 mbar on SrTiO3 substrates with a subsequent high temperature annealing at 890 °C for 15 min in flowing wet oxygen. LÄS MER