Sökning: "Paul Muralt"

Hittade 1 avhandling innehållade orden Paul Muralt.

1. 1. Advanced Thin Film Electroacoustic Devices

   Författare :Johan Bjurström; Ilia Katardjiev; Paul Muralt; Uppsala universitet; []
   Nyckelord :Technology; aluminum nitride; FBAR; shear mode resonator; lamb wave devices; liquid sensor; biosensor; temperature compensation; reactive sputtering; TEKNIKVETENSKAP; TECHNOLOGY; TEKNIKVETENSKAP;

   Sammanfattning : The explosive development of the telecom industry and in particular wireless and mobile communications in recent years has lead to a rapid development of new component and fabrication technologies to continually satisfy the mutually exclusive requirements for better performance and miniaturization on the one hand and low cost on the other. A fundamental element in radio communications is time and frequency control, which in turn is achieved by high performance electro-acoustic components made on piezoelectric single crystalline substrates. LÄS MER