Sökning: "luminescence damage quantum point contact quantum well wires quantum dots lithography aerosol etching plasma III-V semiconductors Semiconductory physics Halvledarfysik"
Hittade 1 avhandling innehållade orden luminescence damage quantum point contact quantum well wires quantum dots lithography aerosol etching plasma III-V semiconductors Semiconductory physics Halvledarfysik.
1. Fabrication of Low-Dimensional Structures in III-V Semiconductors
Sammanfattning : The thesis presents studies on the processing technology and the characterization of nanometer-sized and low-dimensional structures in III-V semiconductors. Two major approaches are described: 1) the combination of aerosol technology and plasma etching for the fabrication of quantum dots (QDs) in InP-based materials and 2) the use of high-resolution electron beam lithography and plasma or wet chemical etching to make quantum well wires (QWWs) in both GaAs and InP-based structures. LÄS MER