Sökning: "Jyh-Wei Lee"
Hittade 1 avhandling innehållade orden Jyh-Wei Lee.
1. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation
Sammanfattning : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. LÄS MER
Resultatsidor:
1