Sökning: "Jyh-Wei Lee"

Hittade 1 avhandling innehållade orden Jyh-Wei Lee.

  1. 1. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation

    Författare :Xiao Li; Grzegorz Greczynski; Ivan Petrov; Lars Hultman; Jyh-Wei Lee; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; PVD; Magnetron sputtering; Thin films; HiPIMS; TiAlN; Energy efficiency;

    Sammanfattning : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. LÄS MER