Sökning: "substrate bias"

Visar resultat 16 - 20 av 55 avhandlingar innehållade orden substrate bias.

  1. 16. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

    Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Arutiun P. Ehiasarian; Linköpings universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

    Sammanfattning : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. LÄS MER

  3. 17. Growth and Characterization of ZrB2 Thin Films

    Författare :Lina Tengdelius; Hans Högberg; Urban Forsberg; Denis Music; Linköpings universitet; []
    Nyckelord :Zirconium diboride ZrB2 ; Thin film; Magnetron sputtering; Epitaxi; Silicon carbide SiC ;

    Sammanfattning : In this thesis, growth of ZrB2 thin films by direct current magnetron sputtering is investigatedusing a high vacuum industrial scale deposition system and an ultra-high vacuum laboratory scalesystem. The films were grown from ZrB2 compound targets at temperatures ranging from ambient (without external heating) to 900 °C and with substrate biases from -20 to -120 V. LÄS MER

  4. 18. Design and characterization of MIS devices

    Författare :Kjell Jeppson; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

    Sammanfattning : This work is a part of the research performed at the Research Laboratory of Electronics (Elektronfysik III), concerning [metal-insulator-semiconductor] MIS field-effect devices. It deals with the properties of different memory devices, such as the [metal-nitride-oxide-semiconductor] MNOS and the [floating-gate avalanche-injection metal-oxide-semiconductor] FAMOS memory transistors, where the [metal insulator semiconductor] MIS structure is utilized for information storage. LÄS MER

  5. 19. Solving Problems in Surface Engineering and Tribology by Means of Analytical Electron Microscopy

    Författare :Ernesto Coronel; Sture Hogmark; Urban Wiklund; Mats Halvarsson; Uppsala universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Tribology; Electron Microscopy; Surface Engineering; Structure and Composition; Materialvetenskap; Materials science; Teknisk materialvetenskap;

    Sammanfattning : It is well known that thin coatings can provide increased lifetime and reduced energy consumption for tools and components. During use, e.g. LÄS MER

  7. 20. Intracellular Flows and Fluctuations

    Författare :Johan Elf; Måns Ehrenberg; Peter Wolynes; Uppsala universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Molecular biology; mesoscopic; reaction-diffusion; protein synthesis; amino acid; flow; fluctuations; Molekylärbiologi; Molecular biology; Molekylärbiologi; Molecular Biotechnology; Molekylär bioteknik;

    Sammanfattning : Mathematical models are now gaining in importance for descriptions of biological processes. In this thesis, such models have been used to identify and analyze principles that govern bacterial protein synthesis under amino acid limitation. LÄS MER