Sökning: "electron beam lithography EBL"

Visar resultat 16 - 20 av 21 avhandlingar innehållade orden electron beam lithography EBL.

  1. 16. Manufacture of High Efficiency Surface Relief Computer Generated Holograms

    Författare :Mats Ekberg; Chalmers tekniska högskola; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; kinoforms; ;

    Sammanfattning : This thesis treats design, manufacture, evaluation and applications of computer-generated surface relief holograms - kinoforms. These diffractive, phase-only, planar optical components are characterized by high efficiency, design flexibility, light weight and small size. They can further be reproduced at low cost. LÄS MER

  3. 17. Polymeric Microcavities for Dye Lasers and Wavefront Shapers

    Författare :Sébastien Ricciardi; Ari T. Friberg; Mohamed Bourennane; KTH; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Optical physics; Optisk fysik;

    Sammanfattning : Over the last few years, the available computing power allows us to have a deeper insight into photonics components than we ever had before. In this thesis we use the finite element method (FEM) to explore the behavior of the waves in 2D planar microcavities. LÄS MER

  4. 18. Fabrication and Characterization of Integration Compatible Semiconductor Lasers

    Författare :Mats Hagberg; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

    Sammanfattning : This thesis deals with the fabrication and characterization of integration compatible semiconductor lasers. An extensive investigation of electron-beam lithography (EBL) and chemically assisted ion beam etching (CAIBE) for the fabrication of vertical ultra- high quality facets in GaAs, as well as a systematic characterization of grating coupled surface emitting lasers is presented. LÄS MER

  5. 19. Solid-state nanopores : fabrication and applications

    Författare :Shuangshuang Zeng; Zhen Zhang; Amit Meller; Uppsala universitet; []
    Nyckelord :solid-state nanopore; truncated-pyramidal nanopore; nanopore array; pore size reduction; individual addressability; microfluidics; translocation.; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Sammanfattning : Nanopores are of great interest in study of DNA sequencing, protein profiling and power generation. Among them, solid-state nanopores show obvious advantages over their biological counterparts in terms of high chemical stability and reusability as well as compatibility with the existing CMOS fabrication techniques. LÄS MER

  7. 20. UHV-CVD growth of Ge/Si nanostructures

    Författare :Vilma Zela; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Semiconductory physics; Fysik; Physics; Naturvetenskap; Si; Ge; Esaki diode; Halvledarfysik; Ge layer; Natural science; Ge Ilands; posiotioning;

    Sammanfattning : This thesis is based on the results concerning the epitaxial growth and characterization of silicon (Si) and germanium (Ge) nanostructures. The growth technique was the Ultra High Vacuum Chemical Vapor Deposition (UHV-CVD) that works in relatively low temperatures and low growth pressures. LÄS MER