Sökning: "electron beam lithography EBL"
Visar resultat 21 - 21 av 21 avhandlingar innehållade orden electron beam lithography EBL.
21. Silicon nanowires, nanopillars and quantum dots : Fabrication and characterization
Sammanfattning : Semiconductor nanotechnology is today a very well studied subject, and demonstrations of possible applications and concepts are abundant. However, well-controlled mass-fabrication on the nanoscale is still a great challenge, and the lack of nanofabrication methods that provide the combination of required fabrication precision and high throughput, limits the large-scale use of nanodevices. LÄS MER