Sökning: "sputtered films"

Visar resultat 1 - 5 av 56 avhandlingar innehållade orden sputtered films.

  1. 1. Sputtered Carbon Nitride Thin Films

    Författare :Niklas Hellgren; Bernd Schultrich; Linköpings universitet; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

    Sammanfattning : The relation between the growth conditions and the film structure and properties of reactively magnetron sputtered carbon nitride CNx (0 ≤ x ≤ 0.6) thin films has been studied. The growth of CNx films has been studied when varying the process parameters, such as substrate temperature, N2 (partial) pressure and ion flux. LÄS MER

  3. 2. Optical Absorption and Electrical Conductivity in Lithium Intercalated Amorphous Tungsten Oxide Films

    Författare :Lars Berggren; Gunnar A. Niklasson; Ola Hunderi; Uppsala universitet; []
    Nyckelord :Technology; Lithium intercalation; amorphous; tungsten-oxide; sputtered films; optical absorption; polaron radius.; TEKNIKVETENSKAP; TECHNOLOGY; TEKNIKVETENSKAP;

    Sammanfattning : Optical and electrical properties of electrochemically lithium ion intercalated thin films of x-ray amorphous tungsten oxide made by magnetron sputtering on glass substrates coated with a thin layer of conductive tin doped indium oxide, have been studied. The composition and the density of the films were characterized by the ion beam analysis methods Rutherford Backscattering Spectroscopy and Elastic Recoil Detection Analysis. LÄS MER

  4. 3. Magnetism in Band Gap Engineered Sputtered MgxZn(1-x)O Thin Films

    Författare :Sreekanth Mahadeva; K Venkat Rao; Lyubov Belova; Mark Fox; KTH; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Magnetron co-sputtering; MgO; MgxZn 1-x O; MnxMg 1-x O; thin films; Room-temperature ferromagnetism; band gap engineering; and intrinsic defects;

    Sammanfattning : This dissertation presents a comprehensive study of the intrinsic room temperature ferromagnetism, RTFM, in technologically important thin films of ZnO, MgO, Mg@ZnO, the so-called d0–magnets that do not contain any intrinsic magnetic elements. We also present the first report on magnetism in Mn doped MgO films fabricated by dc magnetron sputtering. LÄS MER

  5. 4. Microstructure and Mechanical Properties of Magnetron Sputtered Refractory Metal Thin Films

    Författare :Stefan Fritze; Ulf Jansson; Erik Lewin; Petr Vasina; Uppsala universitet; []
    Nyckelord :thin films magnetron sputtering; refractory metals; high entropy alloys; mechanical properties; transition metal carbides; Kemi med inriktning mot materialkemi; Chemistry with specialization in Materials Chemistry;

    Sammanfattning : The design and development of new multifunctional materials that exhibit a combination of high hardness and ductility, as well as a high corrosion resistance and thermal stability, is one of the key challenges in the field of material science. The focus of this thesis is on the development of novel multifunctional magnetron sputtered CrNbTaTiW–C based thin films. LÄS MER

  7. 5. Defects in Titanium Aluminum Nitride-Based Thin Films

    Författare :Janella Salamania; Magnus Odén; Lars Johnson; Lina Rogström; Zoe Barber; Linköpings universitet; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Thin films; Ti-Al-N; Defects; Physical vapor deposition;

    Sammanfattning : Coatings and thin films inherently contain several types of defects. This thesis aims to enhance the understanding of the relationship of defects on the growth, structure, stability, and properties of titanium aluminum nitride films synthesized by physical vapor deposition techniques. LÄS MER