Sökning: "Magnetron co-sputtering"

Visar resultat 1 - 5 av 15 avhandlingar innehållade orden Magnetron co-sputtering.

1. 1. Growth and Characterization of Nb3Al Thin Films for Low-Noise Terahertz Electronics

   Författare :Dimitar Milkov Dochev; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; tunnel junction; SIS; Nb3Al; hot electron bolometer; thin film; superconductor; epitaxial film; magnetron co-sputtering;

   Sammanfattning : Demand on ultimately sensitive heterodyne receivers for, e.g., radio astronomy and environmental science instrumentation, has driven large research activities on novel materials and devices for extending the frequency range into the THz domain. LÄS MER

3. 2. Magnetism in Band Gap Engineered Sputtered MgxZn(1-x)O Thin Films

   Författare :Sreekanth Mahadeva; K Venkat Rao; Lyubov Belova; Mark Fox; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; Magnetron co-sputtering; MgO; MgxZn 1-x O; MnxMg 1-x O; thin films; Room-temperature ferromagnetism; band gap engineering; and intrinsic defects;

   Sammanfattning : This dissertation presents a comprehensive study of the intrinsic room temperature ferromagnetism, RTFM, in technologically important thin films of ZnO, MgO, Mg@ZnO, the so-called d0–magnets that do not contain any intrinsic magnetic elements. We also present the first report on magnetism in Mn doped MgO films fabricated by dc magnetron sputtering. LÄS MER

4. 3. Toward Energy-efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating during Magnetron Sputtering by Employing Metal Ion Irradiation

   Författare :Xiao Li; Grzegorz Greczynski; Ivan Petrov; Lars Hultman; Jyh-Wei Lee; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; PVD; Magnetron sputtering; Thin films; HiPIMS; TiAlN; Energy efficiency;

   Sammanfattning : In this Thesis, magnetron sputtering is perfected as an environmental-friendly deposition technique. I performed systematic studies of a novel approach - hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) with metal-ion-synchronized substrate bias pulses. LÄS MER

5. 4. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

   Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Arutiun P. Ehiasarian; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. LÄS MER

7. 5. Magnetron Sputtering of Nanocomposite Carbide Coatings for Electrical Contacts

   Författare :Kristian Nygren; Ulf Jansson; Peter Leisner; Uppsala universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; transition metal carbide; amorphous carbon; composite; contact resistance; corrosion; friction; optical properties;

   Sammanfattning : Today’s electronic society relies on the functionality of electrical contacts. To achieve good contact properties, surface coatings are normally applied. Such coatings should ideally fulfill a combination of different properties, like high electrical conductivity, high corrosion resistance, high wear resistance and low cost. LÄS MER