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1. 1. Heterogeneous material integration for MEMS

   Författare :Fredrik Forsberg; Frank Niklaus; Lina Sarro; KTH; []
   Nyckelord :;

   Sammanfattning : This thesis describes heterogeneous integration methods for the fabrication of microelectromechanical systems (MEMS). Most MEMS devices reuse the fabrication techniques that are found in the microelectronics integrated circuit industry. This limits the selection of materials and processes that are feasible for the realization of MEMS devices. LÄS MER