Sökning: "Laurent Souqui"

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1. 1. Chemical vapour deposition of sp2-hybridised B-C-N materials from organoborons

   Författare :Laurent Souqui; Anne Henry; Hans Högberg; Henrik Pedersen; John R. Abelson; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; boron nitride; epitaxy; CVD; boron carbide; carbonitride; PECVD;

   Sammanfattning : Thin films of sp2-BN are promising materials for graphene and deep-UV optoelectronics. They are typically deposited by thermally activated chemical vapour deposition (CVD) from triethylboron (TEB) and ammonia (NH3) at 1500 °C, albeit in a narrow process window. LÄS MER