Sökning: "PECVD"
Visar resultat 1 - 5 av 17 avhandlingar innehållade ordet PECVD.
1. Technology for photonic components in silica/silicon material structure
Sammanfattning : The main objectives of this thesis were to develop a lowtemperature PECVD process suitable for optoelectronicintegration, and to optimize silica glass composition forUV-induced modifications of a refractive index in PECVDfabricated planar devices. The most important achievement isthe successful development of a low temperature silicadeposition, which for the first time makes it is possible tofabricate good quality low loss integrated components whilekeeping the temperature below 250oC during the entirefabrication process. LÄS MER
2. Carbon nanomaterial-based interconnects, integrated capacitors and supercapacitors
Sammanfattning : The constant miniaturization and steady performance improvement of electronics devices have generated innovative ideas such as internet of thing (IoT), which also includes devices with integrated energy sources. The high performance is conceived by the high density of the devices on a chip leading to a high density of interconnects, to connect these devices to outside world. LÄS MER
3. Joint Interface Effects on Machining System Vibration
Sammanfattning : Vibration problems are still the major constraint in modern machining processes that seek higher material removal rate, shorter process time, longer tool life and better product quality. Depending on the process, the weaker structure element can be the tool/tool holder, workpiece/fixture or both. LÄS MER
4. Carbon-nanofibre-based tunable photonic crystals
Sammanfattning : Photonic crystals are materials with periodically varying refractive indices. In conventional photonic crystal design it is hard to achieve tunable structures in the visible range. That is, structures with changeable optical properties. LÄS MER
5. Tunable photonic crystals based on carbon nanofibers
Sammanfattning : Photonic crystals are materials with periodically varying refractive indices. In conventional photonic crystal design it is hard to achieve tunable structures in the visible range, i.e. structures with changeable optical properties. LÄS MER