Sökning: "lithography"

Visar resultat 1 - 5 av 192 avhandlingar innehållade ordet lithography.

  1. 1. Statistical optics and optical elements for microtechnologies: Partial coherence, lithography and microlenses

    Författare :Christer Rydberg; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; inverse methods; microlenses; optical propagation; partial coherence; dynamic speckle; lithography;

    Sammanfattning : The scientific problems treated in this thesis are expressed within the framework ofstatistical optics and are generated out of the optical lithography industry. Opticallithography uses partially coherent light, i.e. light with a random wavefront, toincrease the performance of the lithographic process. LÄS MER

  3. 2. Bioelectronic Nanosensor Devices for Environmental and Biomedical Analysis

    Författare :Klas Risveden; Tillämpad biokemi; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Regional Ion Sensitive Field Effect Transistor; Region Ion Sensitive Field Effect Transistor; RISFET; Conducting channel; Bioelectronic Nanosensor; Bioelectronic; Biosensor; Nanosensor; Chemical Sensor; Sensor; Semiconductor sensor; Single molecule trapping; Scaling; Protein trapping; Nanoelectronics; Lab-on-a-chip; pico-ammeter; Nanobiosensor; Sample Applicator; Sequential Batch Analysis; Sequential Batch Analysis System; SBAS; Nanowire; Branched nanowire structure; Nanotree; Nanorod; Nano processing; Micro processing; Electron Beam Lithography; EBL; UV-lithography; Molecular Imprinting; DUV-lithography; Moleculary Imprinted Polymers; MIP; Biomimetics; QCM; Biomimetic sensor; Quartz Crystal Microbalance; QCM-D; Nanoparticles; Acetylcholine esterase; Glucose oxidase; Glucose; Gluconolactone; Propranolol; Gluconate; Carbofuran; Neurotoxic; Environmental analysis; Biomedical Analysis; Biotechnology; Medicine; Pesticide; Food Technology; Analyis; Flow Injection Analysis; FIA; Scanning Probe Microscopy; Scanning Kelvin Probe Microscopy; SPM; KPM; AFM; SKM; KPFM; SKPM; Nanostructures.; Atomic Force Microscopy; KFM;

    Sammanfattning : A new type of Bioelectronic Nanosensor Device with potential applications in medicine,biotechnology and environmental analysis was designed. The nanosensor is based on RISFET (Regional Ion Sensitive Field Effect Transistor) technology. LÄS MER

  4. 3. Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers

    Författare :Marc Beck; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; electrochemistry; interdigitated array; anti-adhesion; anti-sticking; stamp; mold; monolayer deposition; Fysik; post-imprint processes; Physics; transducer; nanoimprint lithography; sensor; Fysicumarkivet A:2003:Beck;

    Sammanfattning : This thesis gives an overview about the current status of nanoimprint lithography, a relatively new nanofabrication tool. The technology is capable for parallel mass production of nm-structured features having a resolution below 10 nm and is usable with high throughput on full wafer scale. LÄS MER

  5. 4. Nanostructured carbon materials prepared by hole-mask colloidal lithography

    Författare :Hans Fredriksson; Chalmers tekniska högskola; []
    Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; HOPG; GC; Colloidal Lithography; Oxygen; RIE; Nanofabrication;

    Sammanfattning : Research and development of nanofabrication methods can be motivated both formanufacturing of commercially available products like micro electronic componentsand for development of model systems for fundamental and applied science. Thefabrication process developed during this work, hole-mask colloidal lithography(HCL), is primarily oriented towards the latter two, specifically for research in thefields of catalysis, nanoparticle plasmons, and bio- and fundamental physics. LÄS MER

  7. 5. Nanopatterning by Swift Heavy Ions

    Författare :Marek Skupinski; Klas Hjört; Jens Jensen; Christina Trautmann; Uppsala universitet; []
    Nyckelord :Materials science; swift heavy ions; lithography; nanopatterning; self-assembly; Materialvetenskap;

    Sammanfattning : Today, the dominating way of patterning nanosystems is by irradiation-based lithography (e-beam, DUV, EUV, and ions). Compared to the other irradiations, ion tracks created by swift heavy ions in matter give the highest contrast, and its inelastic scattering facilitate minute widening and high aspect ratios (up to several thousands). LÄS MER