Sökning: "anti-sticking"

Hittade 2 avhandlingar innehållade ordet anti-sticking.

  1. 1. Development of Nanoimprint Lithography for Applications in Electronics, Photonics and Life-sciences

    Författare :Patrick Carlberg; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; Mikroelektronik; Microelectronics; Teknik; ballistic; Technological sciences; Fysik; Physics; nanowire; TBJ; cantilever; IDA electrode; sensors; life-science; lift-off; patterning media; anti-sticking; mold; stamp; process development; thermal imprint; nanoimprint lithography; Biotechnology; Bioteknik; nanotechnology; polymer; nanostructure;

    Sammanfattning : This thesis describes different aspects of nanotechnology manufacturing with nanoimprint lithography (NIL), a relatively new nanofabrication tool capable of high resolution and high throughput. Surface structure creation with NIL is based on mechanical deformation of the patterning material. LÄS MER

  3. 2. Development of Nanoimprint Lithography for Fabrication of Electrochemical Transducers

    Författare :Marc Beck; Fasta tillståndets fysik; []
    Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; electrochemistry; interdigitated array; anti-adhesion; anti-sticking; stamp; mold; monolayer deposition; Fysik; post-imprint processes; Physics; transducer; nanoimprint lithography; sensor; Fysicumarkivet A:2003:Beck;

    Sammanfattning : This thesis gives an overview about the current status of nanoimprint lithography, a relatively new nanofabrication tool. The technology is capable for parallel mass production of nm-structured features having a resolution below 10 nm and is usable with high throughput on full wafer scale. LÄS MER