Avancerad sökning

Hittade 2 avhandlingar som matchar ovanstående sökkriterier.

1. 1. Silicon Oxynitride Thin Films Grown by Reactive HiPIMS

   Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Jón Tómas Guðmundsson; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. LÄS MER

3. 2. Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

   Författare :Tuomas Hänninen; Hans Högberg; Susann Schmidt; Lars Hultman; Arutiun P. Ehiasarian; Linköpings universitet; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

   Sammanfattning : Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. LÄS MER