Sökning: "High Power Pulsed Magnetron Sputtering"

Visar resultat 6 - 10 av 15 avhandlingar innehållade orden High Power Pulsed Magnetron Sputtering.

1. 6. Plasma Characterization & Thin Film Growth and Analysis in Highly Ionized Magnetron Sputtering

   Författare :Jones Alami; Ulf Helmersson; James Bradley; Linköpings universitet; []
   Nyckelord :Highly ionized pulsed magnetron sputtering; HPPMS; HPPIMS; thin film; plasma analysis; Langmuir probe; TECHNOLOGY; TEKNIKVETENSKAP;

   Sammanfattning : The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). LÄS MER

3. 7. The effect of extreme power densities applied to a planar magnetron

   Författare :Johan Böhlmark; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : In plasma assisted thin film growth control over the energy and direction of the incoming species is desired. If the growth species are ionized this can be achieved by the use of a substrate bias. ions may be accelerated by an applied potential, whereas neutral particles may not. LÄS MER

4. 8. Thin Film Growth using Pulsed and Highly Ionized Vapor Fluxes

   Författare :Viktor Elofsson; Kostas Sarakinos; Jones Alami; Linköpings universitet; []
   Nyckelord :;

   Sammanfattning : Microstructure and morphology of thin films are decisive for many of their resulting properties. To be able to tailor these properties, and thus the film functionality, a fundamental understanding of thin film growth needs to be acquired. LÄS MER

5. 9. Nucleation and stress generation in thin films deposited with a pulsed energetic deposition flux

   Författare :Daniel Magnfält; Ulf Helmersson; Fridrik Magnus; Linköpings universitet; []
   Nyckelord :;

   Sammanfattning : This thesis presents fundamental mechanisms of nucleation and early growth of and stress generation in thin polycrystalline metal films deposited using pulsed energetic deposition fluxes. The effects of a pulsed deposition flux and energetic bombardment on film nucleation was investigated using in situ stress measurements and in situ ellipsometry to determine the film thickness at which the films become continuous. LÄS MER

7. 10. Growth of Wide-Band Gap AlN and (SiC)x(AlN)1-x Thin Films by Reactive Magnetron Sputter Deposition

   Författare :Sukkaneste Tungasmita; Gregory W. Auner; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The research presented in this thesis is focused on thin film synthesis of epitaxial wurtzite structure aluminum nitride (AlN) and related alloy, (SiC)x(AlN)1-x,by ultra-high-vacuum (UHV) reactive magnetron sputter deposition, on silicon carbide (6H-SiC) substrates. The emphasis of the work is on controlling the growth and quality of the films to be able to use the materials in electronic device applications. LÄS MER