Sökning: "High Power Pulsed Magnetron Sputtering"

Visar resultat 11 - 15 av 15 avhandlingar innehållade orden High Power Pulsed Magnetron Sputtering.

1. 11. Yttria-Stabilized Zirconia and Gadolinia-Doped Ceria Thin Films for Fuel Cell Applications

   Författare :Steffen Sønderby; Per Eklund; Scott Barnett; Linköpings universitet; []
   Nyckelord :;

   Sammanfattning : Solid oxide fuel cells convert chemical energy directly into electrical energy with high efficiency and low emission of pollutants. However, before fuel cell technology can gain a significant share of the electrical power market, the operation temperature needs to be reduced in order to decrease costs and improve the durability of the cells. LÄS MER

3. 12. Fundamental processes in thin film growth : The origin of compressive stress and the dynamics of the early growth stages

   Författare :Daniel Magnfält; Ulf Helmsersson; Eric Chason; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES;

   Sammanfattning : The fundamental mechanisms behind the generation of compressive stresses in polycrystalline thin films, the effects of pulsed deposition fluxes on the dynamics of the early growth stages as well as the generation of energetic Ar+ ions in high power impulse magnetron sputtering (HiPIMS) discharges has been studied in this thesis.It was found that compressive film stresses in Mo films deposited using energetic vapor fluxes are correlated with high film densities while only a slight lattice expansion compared to relaxed Mo was found. LÄS MER

4. 13. Novel tantalate-niobate films for microwaves

   Författare :Jang-Yong Kim; Alex Grishin; Andrey B. Kozyrev; KTH; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; ferroelectrics; sodium potassium niobates; silver tantalate niobate; barium stronitium titanate; Electronics; Elektronik;

   Sammanfattning : Microwave materials have been widely used in a variety of applications ranging from communication devices to military satellite services, and the study of materials properties at microwave frequencies and the development of functional microwave materials have always been among the most active areas in solid-state physics, materials science, and electrical and electronic engineering. In recent years, the increasing requirements for the development of high speed, high frequency circuits and systems require complete understanding of the properties of materials function at microwave frequencies. LÄS MER

5. 14. Engineered ion-bombardment as a tool in thin film deposition

   Författare :Rommel Paulo B. Viloan; Ulf Helmersson; Daniel Lundin; Rainer Hippler; Linköpings universitet; []
   Nyckelord :NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; HiPIMS; Bipolar HiPIMS; Ion-bombardment; Thin film;

   Sammanfattning : Energetic-ion bombardment has become an attractive route to modify the crystal growth and deposit high quality thin films. In high-power impulse magnetron sputtering (HiPIMS) where the discharge is characterized by a significant amount of ions of the sputter-ejected atoms, energetic-ion bombardment effects could not be underestimated. LÄS MER

7. 15. Characterization of (Ba,Sr)TiO3 thin films for multiplier applications

   Författare :Pär Rundqvist; Chalmers tekniska högskola; []
   Nyckelord :TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; BSTO; THz; triplers; powerhandling capability; multilayer structures; frequency multipliers; Ferroelectric; BST; losses; Varactor; STO;

   Sammanfattning : (Ba,Sr)TiO3 (BSTO) and SrTiO3 (STO) parallel plate ferroelectric varactors are investigated for microwave multiplier applications.STO and BSTO exhibit low losses, high permittivity and largetunability of both permittivity and losses. All films are deposited using Pulsed Laser Deposition, magnetron sputtering and E-beam evaporation. LÄS MER